automatic: TIGER®
Semi automatic Front End RCA Plant
- The plant is build as Digestorium with exhaust socket and adjustable exhaust air flap.
- It is possible to process Wafer with diameter 200 mm in a Standard-Carrier.
Dimensions
Alteration right reservation to introduce improvements
Technical data
- Easy maintenance access
- Optimized footprint
- Short bath changing times
Accessories
- DI- Watergun
- N2-Gun
- Additional process bathes
- Dosing system
- H2O2 Spiking
- Process data logging
