Development and Evaluation of Processes and Equipment

PV-TEC features industrially relevant production technology needed for advanced solar cell processing of silicon wafers of standard and specific sizes (on request) including:

PV-TEC features industrially relevant production technology needed for advanced solar cell processing of silicon wafers of standard and specific sizes (on request) including:

wet-chemical etching, cleaning and conditioning (texturing, single side etching, industrial cleaning sequences, tunnel oxide formation), inline and batch systems on industrial scale but also smaller wet benches
thermal diffusion, oxidation and annealing: POCI3 and BBr3 tube furnace diffusion, dry and wet thermal oxidation and annealing (crystallization, pre-gettering, post-implantation)
LPCVD (low pressure chemical vapor deposition) tube furnace
printing technology: screen, stencil, inkjet and rotational (flexographic, rotary screen) printing as well as single- and multi-nozzle dispensing; application/evaluation of metal, polymer, dielectric, dopant, semiconductor, isolator and etchant pastes; high precision automated and semi-automated printing and dispensing tools and platforms
dry conditioning and etching: plasma and atmospheric processing and tools
PVD (Physical Vapor Deposition): sputtering of dielectric and transparent conductive oxide layers, inline sputtering and evaporation of metal layers and metal stacks both for front and rear contacts of solar cells
sinter and curing technology: inline furnaces for contact sintering and curing (temperature range up to 900°C); photonic sintering; thermal annealing processes
PECVD (Plasma Enhanced Chemical Vapor Deposition): coating with various AR (anti-reflection) and passivation layers in automated and direct and remote plasma systems
laser processing: ablation (local contact opening LCO), doping (selective emitter formation), alloying (laser fired contacts LFC, foil metallization) laser-assisted transfer of metals and dopants, annealing and regeneration; various high quality automated and manual laser workstations, optical bench for laser testing
In all areas of technology, we offer computer-aided modeling for fast and efficient development and optimization of process and equipment components.

We develop and offer technology to process a wide range of advanced cell structures and structural elements based on single and multi-dimensional finite element simulation and analytic calculation tools.

1. PV-TEC front end: wet-chemical bench for cleaning

2. PV-TEC back end: inline fast-firing furnace.