Spray Solvent Tool SST

  • Polymere Removal
  • Photoresist Stripping
  • Substrate Cleaning
  • Developing
  • Metal lift off
  • Manual loading or fully automated handling
  • 2“-12“ wafers and individual substrates
  • 150 mm/200 mm/300 mm bridge configuration possible
  • Individual batch sizes (13, 25, 26, 50, … wafers per batch)
  • Up to 7 heated tanks
  • Single chamber or multiple chamber design
  • In-situ chemical blending and monitoring
  • 95% stainless steel surfaces on wetted parts
  • SECS/GEM Interface

Alteration right reservation to introduce improvements

Further Information after request.

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